Wafer Pre-Aligner

A wafer-image sensor and θ, X, and Z motion stages. A high-resolution linear CCD reads the edge and notch quickly, corrects eccentricity, and aligns the flat or notch to a user-set angle.

• Minimal-contact chuck to limit particles
• Inner filter for Class 1 and contamination control
• One unit handles 6", 8", and 12" wafers
• Footprint 248×285×230mm
• X, Z, and θ are modular for easier maintenance
• Cycle time under 4 seconds
• Micro-stepping drivers for precise positioning
• Precision X ±0.035mm / θ ±0.035mm