Cleanroom monitoring & control system
An integrated cleanroom monitoring and control system that ties FFUs, racks, and the host PC into one network.
System overview
Monitors and controls the FFUs that keep a semiconductor cleanroom in specification, locally or remotely.
A wired link lets the monitoring desk see each zone immediately and alert operators when an alarm occurs, so a large cleanroom can be kept in spec with a small crew.
- System configuration
- Three tiers: HCU (host PC) + RCU/MCU rack (multi-channel) + LIU (FFU controller)
- Communication
- RS232C → converter → RS485 (HCU ↔ rack), RS485 (rack ↔ LIU)
- Rack layout
- RCU/MCU racks expand across channels (CH 1–CH n) and are managed by rack
- Capacity
- Up to 64 LIUs per RS485 channel
Why BLUECORD
- Accumulated know-how in cleanroom monitoring and control
- A wide model range for a fast response to customer requirements
- Ten years of supply to Samsung, LG, SK hynix, and other majors, covering both retrofit and new semiconductor and LCD lines
Cleanroom FFU monitoring and control
The host PC reaches multiple RCU/MCU units through a converter. Each RCU/MCU groups LCUs (FFU controllers) by channel.
Cleanroom EFU monitoring and control
The host PC reaches MCUL_PC / MCUL_PWM / MCUL_BLDC panels (20 units) through a converter. Each panel drives and monitors its BLDC motor controllers directly.
Rack and LIU power details are being prepared. If you need them, please technical inquiry. · ← Back to Automation & FFU